Office
Academic background
Present specialized field
E-Mail Address
Research activities
Works
Home Page
photo
    （Last updated : 2025-03-24 13:43:00）
  ODA Akinori
Department of Electrical and Electronic Engineering, Faculty of Engineering
Graduate School of Engineering
Master's Program in Electrical and Electronic Engineering, Graduate School of Engineering
Professor
■ Office
Tsudanuma Campus, No.2 Building,12th floor room 011210
■ Academic background
1. 〔Doctorial Course〕, Hokkaido University, Completed,
■ Present specialized field
Power engineering, Fundamental plasma, Applied plasma science, Semiconductors, optical properties of condensed matter and atomic physics (Key Word：discharge, plasma, atmospheric pressure plasma, plasma medicine, simulation) 
■ E-Mail Address
  kyoin_mail
■ Research activities
1. 1998/11～ The Japan Society of Applied Physics
2. 1995/11～ The Institute of Electrical Engineers of Japan
■ Works
1. Book Modern Electrical and Electronic Materials  pp.83-159 (Collaboration) 2013/08
2. Article Formation of diamond-like carbon film using high-power impulse magnetron sputtering Thin Solid Films 672,pp.104-108 (Collaboration) 2019/01 Link
3. Article Noncontact measurement of substrate temperature by optical low-coherence interferometry in high-power pulsed magnetron sputtering Japanese Journal of Applied Physics 57,pp.01AC03-1-01AC03-5 (Collaboration) 2018/01
4. Article Numerical Analysis of Substrate-Incident Carbon Flux in Low-Pressure Radio-Frequency CH4 Plasmas for Deposition of Diamond-Like Carbon Films Electronics and Communications in Japan 98(9),pp.31-39 (Collaboration) 2015/09
5. Article Computational study of temporal behavior of incident species impinging on a water surface in dielectric barrier discharge for the understanding of plasma-liquid interface Japanese Journal of Applied Physics 54,pp.01AF03-1-01AF03-7 (Collaboration) 2015/01
Display all(27)
■ Home Page
   http://www.eee.it-chiba.ac.jp/staff/oda.html