サトウ　ノブオ   Satoh Nobuo   佐藤　宣夫    所属   千葉工業大学  工学部 機械電子創成工学科    千葉工業大学  工学研究科 工学専攻    千葉工業大学  工学研究科 機械電子創成工学専攻    職種   教授
言語種別	英語
発行・発表の年月	2010/06
形態種別	学術雑誌
査読	査読あり
標題	Near-field light detection by conservative and dissipative force modulation methods using a piezoelectric cantilever
執筆形態	共著
掲載誌名	Appl. Phys. Lett.
出版社・発行元	AIP Publishing
巻・号・頁	96(23),pp.233104-233107
著者・共著者	N. Satoh, T. Fukuma, K. Kobayashi, S. Watanabe, T. Fujii, K. Matsushige, and H. Yamada
概要	We demonstrated near-field light detection by dynamic force microscope using a self-sensing piezoelectric cantilever having a lead zirconate titanate thin film layer. The cantilever tip was brought close to a glass plate with a patterned chromium film on a right angle prism. The backside of the prism was irradiated by an intensity modulated laser light to create an evanescent field at the glass surface. We obtained near-field optical images of the patterned glass by detecting the frequency shift modulation or the amplitude modulation induced by the near-field light while the tip-sample distance was regulated by the frequency modulation method in ambient condition.
DOI	10.1063/1.3449131