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サトウ ノブオ
Satoh Nobuo
佐藤 宣夫 所属 千葉工業大学 工学部 機械電子創成工学科 千葉工業大学 工学研究科 工学専攻 千葉工業大学 工学研究科 機械電子創成工学専攻 職種 教授 |
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| 言語種別 | 英語 |
| 発行・発表の年月 | 2015/12/03 |
| 形態種別 | 国際会議プロシーディングス |
| 査読 | 査読あり |
| 標題 | Development of Multi-Probe Atomic Force Microscope and Probe Interaction |
| 執筆形態 | 単著 |
| 掲載誌名 | IEICE Proceeding Series |
| 掲載区分 | 国外 |
| 出版社・発行元 | The Institute of Electronics, Information and Communication Engineers |
| 巻・号・頁 | (47),pp.752-755 |
| 総ページ数 | 4 |
| 担当区分 | 筆頭著者 |
| 著者・共著者 | Nobuo Satoh |
| 概要 | We developed a multi-probe atomic force microscopy (MP-AFM) systems using piezoelectric cantilevers and piezoresistive ones. The use of self-sensing cantilevers with deflection sensors as probes markedly reduced complexity in the MP-AFM setup. Simultaneous observation images can be acquired by the MP-AFM under frequency modulation (FM) detection operations. The minimum distance between these probes was 6.9 um when it used the piezoresistive cantilevers. We found that the nanoscale interaction between the probes was detected by determining the change in the amplitude of each cantilever. It was clarified that the interaction effect depended on the vibration amplitude of the cantilever-probe. |
| DOI | 10.34385/proc.47.B4L-F-5 |
| NAID | 230000009089 |