サトウ　ノブオ   Satoh Nobuo   佐藤　宣夫    所属   千葉工業大学  工学部 機械電子創成工学科    千葉工業大学  工学研究科 工学専攻    千葉工業大学  工学研究科 機械電子創成工学専攻    職種   教授
言語種別	英語
発行・発表の年月	2017/04
形態種別	学術雑誌
標題	Using dynamic force microscopy with piezoelectric cantilever for indentation and high-speed observation
執筆形態	共著
掲載誌名	IEICE Nonlinear Theory and Its Applications
掲載区分	国内
出版社・発行元	IEICE-INST ELECTRONICS INFORMATION COMMUNICATIONS ENG
巻・号・頁	8(2),pp.98-106
著者・共著者	Nobuo Satoh, Masayuki Nakahara, Kei Kobayashi, Shunji Watanabe, Toru Fujii, Kazumi Matsushige, Hirofumi Yamada
概要	We investigate the indentation process of lead zirconate titanate (PZT) cantilever on a nanoscale level and attempt a high-speed observation of the process using dynamic force microscopy (DFM), taking advantage of the converse piezoelectric property of the cantilever. We confirm that the PZT cantilever has a good converse piezoelectric effect, works as an excellent actuator, and can produce an indentation on the polymer film, making it suitable for nanoscale applications. Moreover, for use as an actuator instead of a displacement sensor, the PZT cantilever was incorporated into the feedback control system in dynamic force microscopy (DFM), and could successfully be operated. We attempted a high-speed observation using DFM, and we successfully acquired the topographic image on a 1 X 1 µm scan area within 8.5 seconds.
DOI	http://doi.org/10.1587/nolta.8.98