サトウ ノブオ
Satoh Nobuo
佐藤 宣夫 所属 千葉工業大学 工学部 機械電子創成工学科 千葉工業大学 工学研究科 工学専攻 千葉工業大学 工学研究科 機械電子創成工学専攻 職種 教授 |
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言語種別 | 英語 |
発行・発表の年月 | 2014/11 |
形態種別 | 学術雑誌 |
標題 | Scanning near-field optical microscopy system based on frequency-modulation atomic force microscopy using a piezoelectric cantilever |
執筆形態 | 共著 |
掲載誌名 | Japanese Journal of Applied Physics |
掲載区分 | 国内 |
出版社・発行元 | The Japan Society of Applied Physics |
巻・号・頁 | 53(12),pp.125201 |
著者・共著者 | Nobuo Satoh, Kei Kobayashi, Shunji Watanabe, Toru Fujii, Kazumi Matsushige and Hirofumi Yamada |
概要 | We developed a scanning near-field optical microscopy (SNOM) system based on frequency-modulation atomic force microscopy (FM-AFM), using a microfabricated force-sensing cantilever with a lead zirconate titanate (PZT) thin film as an integrated deflection sensor. In the system, an evanescent field is generated on the sample surface by total internal reflection, and the light transmitted through the optically transparent tip is collected by a photomultiplier while the gap distance between the tip and the sample surface is regulated by the FM detection method. We obtained a SNOM image of a sample with the nanometer-scale resolution of polystyrene particles dispersed in a polyvinyl alcohol thin film deposited onto a glass substrate with the developed SNOM/AFM system, under a completely dark condition. |
DOI | 10.7567/JJAP.53.125201 |