サトウ　ノブオ   Satoh Nobuo   佐藤　宣夫    所属   千葉工業大学  工学部 機械電子創成工学科    千葉工業大学  工学研究科 工学専攻    千葉工業大学  工学研究科 機械電子創成工学専攻    職種   教授
言語種別	英語
発行・発表の年月	2013/01
形態種別	学術雑誌
標題	Multi-Probe Atomic Force Microscopy Using Piezo-Resistive Cantilevers and Interaction between Probes
執筆形態	共著
掲載誌名	e-Journal of Surface Science and Nanotechnology
掲載区分	国内
巻・号・頁	11,pp.13-17
著者・共著者	Nobuo Satoh, Eika Tsunemi, Kei Kobayashi, Kazumi Matsushige, Hirofumi Yamada
概要	We developed a multi-probe atomic force microscopy (MP-AFM) system using piezo-resistive cantilevers. The use of piezo-resistive self-sensing cantilevers with deflection sensors as probes markedly reduced complexity in the ordinary AFM setup. Simultaneous observation images can be acquired by the MP-AFM under frequency modulation (FM) detection operations. The minimum distance between these probes was 6.9 μm using the piezo-resistive cantilevers fabricated by a focused ion beam. Furthermore, we found that the nanoscale interaction between the probes was detected by determining the change in the amplitude of each cantilever. It was clarified that the interaction effect depended on the vibration amplitude of the cantilever-probe.
DOI	http://doi.org/10.1380/ejssnt.2013.13