サトウ　ノブオ   Satoh Nobuo   佐藤　宣夫    所属   千葉工業大学  工学部 機械電子創成工学科    千葉工業大学  工学研究科 工学専攻    千葉工業大学  工学研究科 機械電子創成工学専攻    職種   教授
言語種別	英語
発行・発表の年月	2002/12
形態種別	学術雑誌
査読	査読あり
標題	Investigations of local surface properties by SNOM combined with KFM using a PZT cantilever
執筆形態	共著
掲載誌名	IEICE TRANSACTIONS ON ELECTRONICS
掲載区分	国内
巻・号・頁	E85-C(12),pp.2071-2076
著者・共著者	N. Satoh, Watanabe, T. Fujii, K. Kobayashi, H. Yamada, K. Matsushige
概要	Scanning near-field optical microscopy (SNOM) combined with Kelvin force microscopy (KFM) using a micro-fabricated force-sensing cantilever with a lead zirconate titanate (PZT) thin film as an integrated deflection sensor have been developed. We applied the frequency modulation (FM) detection method to this setup to increase the detection sensitivity of electrostatic forces between a probe tip and a sample. Latex particles dispersed in a polyvinylalcohol (PVA) thin film deposited onto a glass substrate were stably imaged with the SNOM while both local optical and electrical properties of a ferroelectric thin film were successfully investigated.
ISSN	0916-8524