サトウ　ノブオ   Satoh Nobuo   佐藤　宣夫    所属   千葉工業大学  工学部 宇宙・半導体工学科    千葉工業大学  工学研究科 工学専攻    千葉工業大学  工学研究科 機械電子創成工学専攻    職種   教授
言語種別	英語
発行・発表の年月	2007/08/23
形態種別	学術雑誌
標題	Multi-probe atomic force microscopy using piezoelectric cantilevers
執筆形態	共著
掲載誌名	Japanese Journal of Applied Physics
掲載区分	国外
出版社・発行元	The Japan Society of Applied Physics
巻・号・頁	46(8B),pp.5543-5547
著者・共著者	N. Satoh, E. Tsunemi, Y. Miyato, K. Kobayashi, S. Watanabe, T. Fujii, K. Matsushige and H. Yamada
概要	We developed a multi-probe atomic force microscopy (AFM) system using piezoelectric thin film (PZT) cantilevers. The use of self-sensing cantilevers with integrated deflection sensors as probes markedly reduced complexity in the ordinary AFM setup. Address-patterned samples having microfabricated x-y coordinate patterns, fabricated by electron beam lithography, were developed as well. These samples allow us to evaluate the relative distance between the probes by the comparison of the images obtained. Although the minimum distance between these probes was 126 mu m using the original cantilevers, it was reduced to 9.2 mu m by using the PZT cantilevers modified by a focused ion beam. Furthermore, we found that the interaction forces between the cantilevers were detected by determining the change in the amplitude of each cantilever.
DOI	10.1143/JJAP.46.5543
PermalinkURL	https://iopscience.iop.org/article/10.1143/JJAP.46.5543