サトウ　ノブオ   Satoh Nobuo   佐藤　宣夫    所属   千葉工業大学  工学部 宇宙・半導体工学科    千葉工業大学  工学研究科 工学専攻    千葉工業大学  工学研究科 機械電子創成工学専攻    職種   教授
言語種別	英語
発行・発表の年月	2017/04/26
形態種別	学術雑誌
査読	査読あり
標題	Using dynamic force microscopy with piezoelectric cantilever for indentation and high-speed observation
執筆形態	共著
掲載誌名	IEICE NONLINEAR THEORY AND ITS APPLICATIONS
掲載区分	国外
出版社・発行元	一般社団法人 電子情報通信学会
巻・号・頁	8(2),pp.98-106
総ページ数	9
担当区分	筆頭著者,責任著者
著者・共著者	Satoh Nobuo, Nakahara Masayuki, Kobayashi Kei, Watanabe Shunji, Fujii Toru, Matsushige Kazumi, Yamada Hirofumi
概要	We investigate the indentation process of lead zirconate titanate (PZT) cantilever on a nanoscale level and attempt a high-speed observation of the process using dynamic force microscopy (DFM), taking advantage of the converse piezoelectric property of the cantilever. We confirm that the PZT cantilever has a good converse piezoelectric effect, works as an excellent actuator, and can produce an indentation on the polymer film, making it suitable for nanoscale applications. Moreover, for use as an actuator instead of a displacement sensor, the PZT cantilever was incorporated into the feedback control system in dynamic force microscopy (DFM), and could successfully be operated. We attempted a high-speed observation using DFM, and we successfully acquired the topographic image on a 1 x 1 mu m scan area within 8.5 seconds.
DOI	https://doi.org/10.1587/nolta.8.98
ISSN	2185-4106
NAID	130005530415
PermalinkURL	https://www.jstage.jst.go.jp/article/nolta/8/2/8_98/_article