サトウ　ノブオ   Satoh Nobuo   佐藤　宣夫    所属   千葉工業大学  工学部 宇宙・半導体工学科    千葉工業大学  工学研究科 工学専攻    千葉工業大学  工学研究科 機械電子創成工学専攻    職種   教授
言語種別	英語
発行・発表の年月	2021/10/01
形態種別	学術雑誌
査読	査読あり
標題	Photo radiation pressure at resonance of frequency modulated micro cantilever
執筆形態	共著
掲載誌名	Nonlinear Theory and Its Applications, IEICE
掲載区分	国外
出版社・発行元	The Institute of Electronics, Information and Communication Engineers
巻・号・頁	12(4),pp.718-725
総ページ数	8
担当区分	筆頭著者,責任著者
著者・共著者	Satoh Nobuo, Oh Jimin, Hikihara Takashi
概要	We demonstrated high-sensitivity measurement of photo-radiation pressure by applying frequency modulation (FM) detection for the resonance phenomenon of the micro-cantilever structure. We constructed a system to detect minute displacements using the optical-lever method and achieved a noise density of approximately 1pm/√Hz from the thermal vibration measurement. The resonance frequency shift was positive, which meant repulsive forces acted on the metal surface by way of the force generated due to incidence of the laser beam on the stainless-steel (SS) cantilever. For an incident light of 1mW intensity, a vibration amplitude of 0.687 nm and a radiation pressure of 0.378µN were measured experimentally.
DOI	https://doi.org/10.1587/nolta.12.718
ISSN	2185-4106
NAID	130008098022
PermalinkURL	https://www.jstage.jst.go.jp/article/nolta/12/4/12_718/_article/-char/en