サトウ　ノブオ   Satoh Nobuo   佐藤　宣夫    所属   千葉工業大学  工学部 宇宙・半導体工学科    千葉工業大学  工学研究科 工学専攻    千葉工業大学  工学研究科 機械電子創成工学専攻    職種   教授
言語種別	英語
発行・発表の年月	2017/07
形態種別	学術雑誌
標題	Near-field light detection of a photo induced force by atomic force microscopy with frequency modulation
執筆形態	共著
掲載誌名	Japanese Journal of Applied Physics
出版社・発行元	The Japan Society of Applied Physics
巻・号・頁	Volume 56(Number 8S1)
著者・共著者	N. Satoh, K. Kobayashi, S. Watanabe, T. Fujii, K. Matsushige, H. Yamada
概要	We demonstrated near-field light detection using a non contact-mode atomic force microscope (nc-AFM). This system obtains molecular-level resolution by reducing noise in the displacement detection of a Si cantilever. The Si cantilever probe tip was brought close to a glass with a patterned chromium film on a dove prism. The backside of the prism was irradiated by an intensity-modulated laser light to create an evanescent field at the glass surface. We obtained a near-field optical image of the chromium-patterned glass by detecting the amplitude modulation induced by the near-field light while the tip-sample distance was regulated by the frequency modulation method under atmospheric conditions.
DOI	10.7567/JJAP.56.08LB03