サトウ　ノブオ   Satoh Nobuo   佐藤　宣夫    所属   千葉工業大学  工学部 宇宙・半導体工学科    千葉工業大学  工学研究科 工学専攻    千葉工業大学  工学研究科 機械電子創成工学専攻    職種   教授
言語種別	英語
発行・発表の年月	2016/07
形態種別	学術雑誌
標題	Optical and mechanical detection of near-field light by atomic force microscopy using a piezoelectric cantilever
執筆形態	共著
掲載誌名	Japanese Journal of Applied Physics
掲載区分	国内
出版社・発行元	The Japan Society of Applied Physics
巻・号・頁	Volume 55(Number 8S1)
著者・共著者	Nobuo Satoh, Kei Kobayashi, Shunji Watanabe, Toru Fujii, Kazumi Matsushige and Hirofumi Yamada
概要	In this study, we developed an atomic force microscopy (AFM) system with scanning near-field optical microscopy (SNOM) using a microfabricated force-sensing cantilever with a lead zirconate titanate (PZT) thin film. Both optical and mechanical detection techniques were adopted in SNOM to detect scattered light induced by the interaction of the PZT cantilever tip apex and evanescent light, and SNOM images were obtained for each detection scheme. The mechanical detection technique did allow for a clear observation of the light scattered from the PZT cantilever without the interference observed by the optical detection technique, which used an objective lens, a pinhole, and a photomultiplier tube.
DOI	10.7567/JJAP.55.08NB04