サトウ　ノブオ   Satoh Nobuo   佐藤　宣夫    所属   千葉工業大学  工学部 宇宙・半導体工学科    千葉工業大学  工学研究科 工学専攻    千葉工業大学  工学研究科 機械電子創成工学専攻    職種   教授
言語種別	英語
発行・発表の年月	2014/11/06
形態種別	学術雑誌
標題	Scanning near-field optical microscopy system based on frequency-modulation atomic force microscopy using a piezoelectric cantilever
執筆形態	共著
掲載誌名	Japanese Journal of Applied Physics
掲載区分	国外
出版社・発行元	The Japan Society of Applied Physics
巻・号・頁	53(12),pp.125201-1-125201-5
担当区分	筆頭著者,責任著者
著者・共著者	Nobuo Satoh, Kei Kobayashi, Shunji Watanabe, Toru Fujii, Kazumi Matsushige and Hirofumi Yamada
概要	We developed a scanning near-field optical microscopy (SNOM) system based on frequency-modulation atomic force microscopy (FM-AFM), using a microfabricated force-sensing cantilever with a lead zirconate titanate (PZT) thin film as an integrated deflection sensor. In the system, an evanescent field is generated on the sample surface by total internal reflection, and the light transmitted through the optically transparent tip is collected by a photomultiplier while the gap distance between the tip and the sample surface is regulated by the FM detection method. We obtained a SNOM image of a sample with the nanometer-scale resolution of polystyrene particles dispersed in a polyvinyl alcohol thin film deposited onto a glass substrate with the developed SNOM/AFM system, under a completely dark condition.
DOI	10.7567/JJAP.53.125201
PermalinkURL	https://iopscience.iop.org/article/10.7567/JJAP.53.125201