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サトウ ノブオ
Satoh Nobuo
佐藤 宣夫 所属 千葉工業大学 工学部 宇宙・半導体工学科 千葉工業大学 工学研究科 工学専攻 千葉工業大学 工学研究科 機械電子創成工学専攻 職種 教授 |
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| 言語種別 | 英語 |
| 発行・発表の年月 | 2013/01/01 |
| 形態種別 | 学術雑誌 |
| 標題 | Multi-Probe Atomic Force Microscopy Using Piezo-Resistive Cantilevers Interaction between Probes |
| 執筆形態 | 共著 |
| 掲載誌名 | e-Journal of Surface Science and Nanotechnology |
| 掲載区分 | 国外 |
| 巻・号・頁 | 11,pp.13-17 |
| 担当区分 | 筆頭著者,責任著者 |
| 著者・共著者 | Nobuo Satoh, Eika Tsunemi, Kei Kobayashi, Kazumi Matsushige, Hirofumi Yamada |
| 概要 | We developed a multi-probe atomic force microscopy (MP-AFM) system using piezo-resistive cantilevers. The use of piezo-resistive self-sensing cantilevers with deflection sensors as probes markedly reduced complexity in the ordinary AFM setup. Simultaneous observation images can be acquired by the MP-AFM under frequency modulation (FM) detection operations. The minimum distance between these probes was 6.9 μm using the piezo-resistive cantilevers fabricated by a focused ion beam. Furthermore, we found that the nanoscale interaction between the probes was detected by determining the change in the amplitude of each cantilever. It was clarified that the interaction effect depended on the vibration amplitude of the cantilever-probe. |
| DOI | 10.1380/ejssnt.2013.13 |
| PermalinkURL | https://www.jstage.jst.go.jp/article/ejssnt/11/0/11_13/_article/-char/ja/ |