サトウ　ノブオ   Satoh Nobuo   佐藤　宣夫    所属   千葉工業大学  工学部 宇宙・半導体工学科    千葉工業大学  工学研究科 工学専攻    千葉工業大学  工学研究科 機械電子創成工学専攻    職種   教授
言語種別	英語
発行・発表の年月	2002/03/28
形態種別	学術雑誌
査読	査読あり
標題	Dynamic-mode AFM using the piezoelectric cantilever: investigations of local optical and electrical properties
執筆形態	共著
掲載誌名	Applied Surface Science
掲載区分	国外
出版社・発行元	ELSEVIER
巻・号・頁	188(3-4),pp.425-429
担当区分	筆頭著者
著者・共著者	N. Satoh, K. Kobayashi, H. Yamada, S. Watanabe, T. Fujii, T. Horiuchi, K. Matsushige
概要	We demonstrated applications of a microfabricated cantilever with a lead zirconate titanate (PZT) piezoelectric thin film as an integrated deflection sensor to dynamic-mode atomic force microscopy (AFM) and to the related techniques including scanning near-field optical microscopy (SNOM) and Kelvin force microscopy (KFM). In the SNOM measurement, the evanescent light scattered by the tip apex was transmitted through the pyramidal hollow tip of the cantilever and it was detected by a photodetector placed in a confocal arrangement. Furthermore, local surface potential of a ferroelectric film was mapped by KFM using the frequency modulation (FM) detection method. Local poled ferroelectric domains made by the AFM tip were imaged by both SNOM and KFM.
DOI	10.1016/S0169-4332(01)00969-2
ISSN	0169-4332
PermalinkURL	https://www.sciencedirect.com/science/article/pii/S0169433201009692