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サトウ ノブオ
Satoh Nobuo
佐藤 宣夫 所属 千葉工業大学 工学部 宇宙・半導体工学科 千葉工業大学 工学研究科 工学専攻 千葉工業大学 工学研究科 機械電子創成工学専攻 職種 教授 |
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| 言語種別 | 英語 |
| 発行・発表の年月 | 2002/12/01 |
| 形態種別 | 学術雑誌 |
| 査読 | 査読あり |
| 標題 | Investigations of local surface properties by SNOM combined with KFM using a PZT cantilever |
| 執筆形態 | 共著 |
| 掲載誌名 | IEICE TRANSACTIONS on Electronics |
| 掲載区分 | 国内 |
| 巻・号・頁 | E85-C(12),pp.2071-2076 |
| 著者・共著者 | N. Satoh, Watanabe, T. Fujii, K. Kobayashi, H. Yamada, K. Matsushige |
| 概要 | Scanning near-field optical microscopy (SNOM) combined with Kelvin force microscopy (KFM) using a micro-fabricated force-sensing cantilever with a lead zirconate titanate (PZT) thin film as an integrated deflection sensor have been developed. We applied the frequency modulation (FM) detection method to this setup to increase the detection sensitivity of electrostatic forces between a probe tip and a sample. Latex particles dispersed in a polyvinylalcohol (PVA) thin film deposited onto a glass substrate were stably imaged with the SNOM while both local optical and electrical properties of a ferroelectric thin film were successfully investigated. |
| ISSN | 0916-8524 |
| PermalinkURL | https://global.ieice.org/en_transactions/electronics/10.1587/e85-c_12_2071/_p |