サトウ　ノブオ   Satoh Nobuo   佐藤　宣夫    所属   千葉工業大学  工学部 宇宙・半導体工学科    千葉工業大学  工学研究科 工学専攻    千葉工業大学  工学研究科 機械電子創成工学専攻    職種   教授
言語種別	英語
発行・発表の年月	2003/07/01
形態種別	学術雑誌
標題	Nanoscale Investigations of Optical and Electrical Properties by Dynamic mode AFM Using a Piezoelectric cantilever
執筆形態	共著
掲載誌名	Japanese Journal of Applied Physics
掲載区分	国内
出版社・発行元	The Japan Society of Applied Physics
巻・号・頁	42(7B),pp.4878-4881
著者・共著者	N. Satoh, K. Kobayashi, S. Watanabe, T. Fujii, T. Horiuchi, H. Yamada, K. Matsushige
概要	We demonstrated a novel application of a microfabricated force-sensing cantilever with a lead zirconate titanate (PZT) thin film as an integrated deflection sensor for a dynamic-mode atomic force microscope (AFM) combined with a scanning near-field optical microscope (SNOM). This experimental setup was also applied to a Kelvin-probe force microscope (KFM) for the investigation of local electrical properties. A frequency modulation (FM) detection method was used for enhancing the detection sensitivity of electrostatic forces between a probe tip and a sample. Local optical properties of a PbTiO3 single crystal were investigated using the conductive PZT cantilever as an AFM/SNOM probe. Furthermore, studies on local optical and electrical properties of ferroelectric copolymer films were also presented.
DOI	10.1143/JJAP.42.4878
PermalinkURL	https://iopscience.iop.org/article/10.1143/JJAP.42.4878